Publikationen

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2018
Underlying Mechanisms for Developing Process Signatures in Manufacturing[Open Access]
Brinksmeier, E.; Reese, Stefanie; Klink, Andreas; Langenhorst, L.; Lübben, T.; Meinke, Matthias; Meyer, D.; Riemer, O.; Sölter, J.
Nanomanufacturing and Metrology 1-4 193-208 (2018)